Hamwe niterambere ryihuse rya 5G, ubwenge bwubukorikori (AI) hamwe na interineti yibintu (IoT), icyifuzo cyibikoresho bikora neza mu nganda zikoresha igice cya kabiri cyiyongereye cyane.Zirconium tetrachloride (ZrCl₄), nkibikoresho byingenzi bya semiconductor, byahindutse ibikoresho byingirakamaro kubikoresho bitunganijwe neza (nka 3nm / 2nm) kubera uruhare runini mugutegura firime-k.
Zirconium tetrachloride na firime-k nyinshi
Mu gukora semiconductor, firime-k nini nimwe mubikoresho byingenzi byo kunoza imikorere ya chip. Mugihe inzira yo gukomeza kugabanuka kubikoresho gakondo bya silicon ishingiye kumarembo ya dielectric (nka SiO₂), umubyimba wabo wegera imipaka igaragara, bigatuma imyanda yiyongera ndetse no kwiyongera kwinshi mumashanyarazi. Ibikoresho byinshi-k (nka okiside ya zirconium, okiside ya hafnium, nibindi) birashobora kongera neza umubyimba wumubiri wurwego rwa dielectric, kugabanya ingaruka za tunnel, bityo bikazamura ituze nimikorere yibikoresho bya elegitoroniki.
Zirconium tetrachloride nintangiriro yingenzi yo gutegura firime-k. Zirconium tetrachloride irashobora guhindurwa muri firime nziza ya zirconium oxyde ikoresheje inzira nko kubika imyuka ya chimique (CVD) cyangwa kubika atome (ALD). Izi firime zifite imiterere myiza ya dielectric kandi irashobora kuzamura cyane imikorere ningufu za chip. Kurugero, TSMC yazanye ibikoresho bitandukanye bishya no kunoza imikorere mubikorwa byayo 2nm, harimo no gukoresha firime zihoraho za dielectric zihoraho, zageze ku kwiyongera k'ubucucike bwa transistor no kugabanya ikoreshwa ry'amashanyarazi.
Isoko ryo gutanga amasoko ku isi
Mu rwego rwo gutanga amasoko yisi yose, gutanga no gutanga umusaruro wazirconium tetrachlorideni ngombwa mu iterambere ry'inganda. Kugeza ubu, ibihugu n'uturere nk'Ubushinwa, Amerika n'Ubuyapani bifite umwanya w'ingenzi mu gukora zirconium tetrachloride hamwe n'ibikoresho bihoraho bya dielectric bihoraho.
Iterambere ry'ikoranabuhanga hamwe n'ibizaza
Iterambere ry'ikoranabuhanga ni ibintu by'ingenzi mu guteza imbere ikoreshwa rya zirconium tetrachloride mu nganda za semiconductor. Mu myaka yashize, gutezimbere uburyo bwa atomic layer deposition (ALD) byahindutse ubushakashatsi. Inzira ya ALD irashobora kugenzura neza ubunini nuburinganire bwa firime kuri nanoscale, bityo bikazamura ubwiza bwa firime zihoraho za dielectric. Kurugero, itsinda ryubushakashatsi bwa Liu Lei wo muri kaminuza ya Peking ryateguye firime ndende ya dielectric ihoraho ya amorphous hakoreshejwe uburyo bwa chimique itose kandi irayikoresha neza mubikoresho bya elegitoroniki ya semiconductor.
Mubyongeyeho, nkuko inzira ya semiconductor ikomeza gutera imbere mubunini buto, urugero rwa zirconium tetrachloride nayo iraguka. Kurugero, TSMC irateganya kugera ku musaruro w’ikoranabuhanga rya 2nm mu gice cya kabiri cya 2025, kandi Samsung nayo itezimbere cyane ubushakashatsi niterambere ryibikorwa byayo 2nm. Kumenyekanisha izi nzira ziterambere ntaho bitandukaniye ninkunga ya firime zihoraho za dielectric, na zirconium tetrachloride, nkibikoresho byingenzi, ni ngombwa kwigaragaza.
Muri make, uruhare runini rwa zirconium tetrachloride mu nganda ziciriritse ziragenda zigaragara. Hamwe no kumenyekanisha 5G, AI hamwe na interineti yibintu, icyifuzo cya chip ikora cyane gikomeje kwiyongera. Zirconium tetrachloride, nkibibanziriza byingenzi bya firime zihoraho za dielectric, bizagira uruhare rudasubirwaho mugutezimbere iterambere ryikoranabuhanga rya chip. Mu bihe biri imbere, hamwe n’iterambere rikomeje gutera imbere mu ikoranabuhanga no kunoza uburyo bwo gutanga amasoko ku isi, ibyifuzo bya zirconium tetrachloride bizaba binini.
Igihe cyo kohereza: Apr-14-2025